SUMAN, Victor; MORARI, Vadim; RUSU, Emil V.; GHIMPU, Lidia; URSAKI, Veaceslav V.
(Institutul de Inginerie Electronică şi Nanotehnologii "D. Ghiţu", 2021)
In this paper, the electrophysical properties of ITO:Ga2O3 thin films grown by RF magnetron sputtering on glass and sapphire substrates are studied. Targets prepared by mechanical pressing of ITO and Ga2O3 powders are used ...