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Porous vs. Magnetron RF Sputtering Of InP for Portable THz-TDS in Pharmaceutical and Medical Applications
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| dc.contributor.author | SIRBU, L. | |
| dc.contributor.author | DANILA, M. | |
| dc.contributor.author | MULLER, R. | |
| dc.contributor.author | GHIMPU, L. | |
| dc.contributor.author | DOBLETBAEV, R. | |
| dc.contributor.author | DASCALU, T. | |
| dc.contributor.author | GRIGORE (SANDU), O. | |
| dc.contributor.author | SARUA, A. | |
| dc.contributor.author | URSAKI, V. | |
| dc.date.accessioned | 2019-10-04T10:48:07Z | |
| dc.date.available | 2019-10-04T10:48:07Z | |
| dc.date.issued | 2013 | |
| dc.identifier.citation | SIRBU, L., DANILA, M., MULLER, R. et al. Porous vs. Magnetron RF Sputtering Of InP for Portable THz-TDS in Pharmaceutical and Medical Applications. In: ICNBME-2013. International Conference on Nanotechnologies and Biomedical Engineering. German-Moldovan Workshop on Novel Nanomaterials for Electronic, Photonic and Biomedical Applications: proc. of the 2th intern. conf., April 18-20, 2013. Chişinău, 2013, pp. 161-162. ISBN 978-9975-62-343-8. | en_US |
| dc.identifier.isbn | 978-9975-62-343-8 | |
| dc.identifier.uri | http://repository.utm.md/handle/5014/4618 | |
| dc.description.abstract | We developed a combination of technology for deposition contacts/wires upon nanoporous InP thin film structures and RF sputtering InP films. Indium phosphide (InP) films were deposited onto glass substrate using RF magnetron sputtering by varying the substrate temperature (50–100oC), under constant argon pressure (6.3•10-3Bar) and RF power (100 W). | en_US |
| dc.language.iso | en | en_US |
| dc.publisher | Technical University of Moldova | en_US |
| dc.rights | Attribution-NonCommercial-NoDerivs 3.0 United States | * |
| dc.rights.uri | http://creativecommons.org/licenses/by-nc-nd/3.0/us/ | * |
| dc.subject | InP films | en_US |
| dc.subject | RF sputterings | en_US |
| dc.subject | porous InP | en_US |
| dc.subject | THz antenna | en_US |
| dc.subject | pelicule subțiri | en_US |
| dc.title | Porous vs. Magnetron RF Sputtering Of InP for Portable THz-TDS in Pharmaceutical and Medical Applications | en_US |
| dc.type | Article | en_US |
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