Deformation vacuum gauge

Abstract

To improve the accuracy of low pressure measurements, a VD-10 tensoresistive vacuum gauge sample has been developed and constructed; the gauge includes a measuring unit and a transducer, the sensitive element of which is a silicon crystal in the middle part of which a thin membrane with tensoresistors placed on the outer surface is formed. To decrease the dependence on the ambient temperature, a circuit consisting of a transistor and resistors is formed on the crystal; the circuit provides power to the bridge circuit with a temperature-dependent voltage to compensate for the drift. In addition, temperature fluctuations are recorded by the measuring unit for additional software correction.