Abstract:
To improve the accuracy of low pressure measurements, a
VD-10 tensoresistive vacuum gauge sample has been
developed and constructed; the gauge includes a measuring
unit and a transducer, the sensitive element of which is a
silicon crystal in the middle part of which a thin membrane
with tensoresistors placed on the outer surface is formed.
To decrease the dependence on the ambient temperature, a
circuit consisting of a transistor and resistors is formed on
the crystal; the circuit provides power to the bridge circuit
with a temperature-dependent voltage to compensate for the
drift. In addition, temperature fluctuations are recorded by
the measuring unit for additional software correction.