Electrostactically in-plane driven silicon micropump for modular configuration

UHLIG, S.; GAUDET, M.; LANGA, S.; SCHIMMANZ, K.; CONRAD, H.; KAISER, B.; SCHENK, H.

dc.contributor.author	UHLIG, S.
dc.contributor.author	GAUDET, M.
dc.contributor.author	LANGA, S.
dc.contributor.author	SCHIMMANZ, K.
dc.contributor.author	CONRAD, H.
dc.contributor.author	KAISER, B.
dc.contributor.author	SCHENK, H.
dc.date.accessioned	2020-12-02T14:06:34Z
dc.date.available	2020-12-02T14:06:34Z
dc.date.issued	2017
dc.identifier.citation	UHLIG, S., GAUDET, M., LANGA, S. et al. Electrostactically in-plane driven silicon micropump for modular configuration. In: MicroFluidic Handling Systems: proceedings 3rd Conference, 4–6 October 2017, Enschede, The Netherlands, 2017, pp. 57-60	en_US
dc.identifier.uri	http://repository.utm.md/handle/5014/11896
dc.description	Acces full text: https://www.utwente.nl/en/eemcs/mfhs2017/mfhs2017-conference-proceedings.pdf	en_US
dc.description.abstract	We present an in-plane reciprocating displacement micropump for liquids and gases which is actuated by a new class of electrostatic bending actuators capable of deflecting beyond the electrode gap distance. The so called “Nano Electrostatic Drive” (NED) actuator was introduced by us in 2015 for out-of-plane actuation. The device presented utilizes an in-plane actuation solution. Depending on the requirements of the targeted system, the micropump can be modularly designed to meet the specified differential pressures and flow rates by a serial arrangement of the actuators and parallel arranging pump-base units respectively.	en_US
dc.language.iso	en	en_US
dc.publisher	University of Twente	en_US
dc.rights	Attribution-NonCommercial-NoDerivs 3.0 United States	*
dc.rights.uri	http://creativecommons.org/licenses/by-nc-nd/3.0/us/	*
dc.subject	micropumps	en_US
dc.title	Electrostactically in-plane driven silicon micropump for modular configuration	en_US
dc.type	Article	en_US