11 - Ultra-thin membranes for sensor applications

Abstract

Technological approaches for the fabrication of ultra-thin membranes for sensor applications are reviewed, with the main focus on graphene and two-dimensional (2D) sheets of layered compounds such as BN, MoS2, Bi2Te3, Bi2Se3. Highly conducting and transparent electrodes based on graphene are promising for use in flexible, stretchable, foldable electronics. The possibility of building multifunctional three-dimensional (3D) nanoarchitectures based on 2D graphene hybridized with one-dimensional (1D) semiconductor nanostructures is highlighted. The chapter also reviews the fabrication of ultra-thin GaN membranes of nanometer scale thickness by using the concept of surface charge lithography based on low-energy ion treatment of the sample surface with subsequent photoelectrochemical etching.