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Efficiency evaluation of ceramic mems device manufactured by laser micromilling
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| dc.contributor.author | SAMOTAEV, Nikolay | |
| dc.contributor.author | OBLOV, Konstntin | |
| dc.contributor.author | IVANOVA, Anastasia | |
| dc.contributor.author | GORSHKOVA, Anastasiya | |
| dc.contributor.author | PODLEPETSKY, Boris | |
| dc.date.accessioned | 2019-10-31T10:44:47Z | |
| dc.date.available | 2019-10-31T10:44:47Z | |
| dc.date.issued | 2019 | |
| dc.identifier.citation | SAMOTAEV, Nikolay, OBLOV, Konstntin, IVANOVA, Anastasia, GORSHKOVA, Anastasiya, PODLEPETSKY, Boris. Efficiency evaluation of ceramic mems device manufactured by laser micromilling In: Electronics, Communications and Computing: extended abstracts of the 10th Intern. Conf.: the 55th anniversary of Technical University of Moldova, Chişinău, October 23-26, 2019. Chişinău, 2019, p.59. ISBN 978-9975-108-84-3. | en_US |
| dc.identifier.isbn | 978-9975-108-84-3 | |
| dc.identifier.uri | http://repository.utm.md/handle/5014/5751 | |
| dc.description | Abstract | en_US |
| dc.description.abstract | This work discusses the design of flexible laser micromilling technology for fast prototyping metal oxide based (MOX) gas sensors in SMD packages as a alternative to traditional silicon clean-room technologies. By laser micromilling technology possible to fabricate custom Micro Electro Mechanical System (MEMS) microhotplate platform and also SMD packages for MOX sensor, that gives complete solution for integration one in devices using IoT conception. | en_US |
| dc.language.iso | en | en_US |
| dc.publisher | Tehnica UTM | en_US |
| dc.rights | Attribution-NonCommercial-NoDerivs 3.0 United States | * |
| dc.rights.uri | http://creativecommons.org/licenses/by-nc-nd/3.0/us/ | * |
| dc.subject | gas sensor | en_US |
| dc.subject | MEMS | en_US |
| dc.subject | SMD-package | en_US |
| dc.subject | 3D-printing | en_US |
| dc.title | Efficiency evaluation of ceramic mems device manufactured by laser micromilling | en_US |
| dc.type | Article | en_US |
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Extended Abstracts of the: The 10th IC|ECCO; October 23-26, 2019
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