Microheaters for copper oxide based gas sensors

Abstract

In recent years, gas sensors based on oxide semiconductors such as copper oxide [1], have a very high development progress, as their market demands are high for the detection of toxic and flammable gases, as well as their low cost, functionality and higher sensor performance are necessarily at elevated operating temperatures between 200-300 oC. For these reasons, the need micro-heaters design and elaboration arises together with uniformity of thermal distribution, low energy consumption and prices, as well as compatibility with the sensor technological processes for integration in microsystems.