MEMS switch design and analysis based on electromagnetic simulator

Abstract

The paper presents a design procedure for a distributed switch consisting of an array of MEMSs (Micro-Electro-Mechanical-Systems) loading a CPW (CoPlanar Waveguide). The MEMS equivalent circuit is developed from the scattering parameters obtained by using an electromagnetic simulator and then this equivalent circuit is used to design the switch. The designed switch consisting of 1, 2 and 3 MEMSs are finally analyzed using again the electromagnetic simulator. The insertion losses in the all cases are smaller than 0.11 dB up to the maximum operating frequency of 35 GHz.