Fundamental Issues in the Manufacturing of Nanoelectromechanical (NEMS) and Related Nanosystems

SINGH, R.; ALAPATT, G. F.; GUPTA, N.; POOLE, K. F.

Home
→
Facultatea Calculatoare, Informatică şi Microelectronică
→
Conferinţe
→
Conferinţa ICNBME - International Conference on Nanotechnologies and Biomedical Engineering
→
2011
→
View Item

dc.contributor.author	SINGH, R.
dc.contributor.author	ALAPATT, G. F.
dc.contributor.author	GUPTA, N.
dc.contributor.author	POOLE, K. F.
dc.date.accessioned	2019-10-24T10:24:44Z
dc.date.available	2019-10-24T10:24:44Z
dc.date.issued	2011
dc.identifier.citation	SINGH, R., ALAPATT, G. F., GUPTA, N. et al. Fundamental Issues in the Manufacturing of Nanoelectromechanical (NEMS) and Related Nanosystems. In: ICNBME-2011. International conference on Nanotechnologies and Biomedical Engineering. German-moldovan workshop on Novel Nanomaterials for Electronic, Photonic and Biomedical Applications: proc. of the intern. conf., July 7-8, 2011. Chişinău, 2011, pp. 154-156. ISBN 978-9975-66-239-0.	en_US
dc.identifier.isbn	978-9975-66-239-0
dc.identifier.uri	http://repository.utm.md/handle/5014/5191
dc.description.abstract	Nanostructures in dimension below about 10 nm show interesting properties because of the effect of low-dimension physics. However, to utilize these properties in practice to commercialize NEMS and related nano-systems require an extremely precise manufacturing process. This paper briefly evaluates the fundamental issues involved in manufacturing the nano-scale systems.	en_US
dc.language.iso	en	en_US
dc.publisher	Technical University of Moldova	en_US
dc.rights	Attribution-NonCommercial-NoDerivs 3.0 United States	*
dc.rights.uri	http://creativecommons.org/licenses/by-nc-nd/3.0/us/	*
dc.subject	NEMS	en_US
dc.subject	manufacturing nanoelectronics	en_US
dc.subject	nanoelectronics	en_US
dc.subject	nanosystems	en_US
dc.subject	nanostructures	en_US
dc.title	Fundamental Issues in the Manufacturing of Nanoelectromechanical (NEMS) and Related Nanosystems	en_US
dc.type	Article	en_US