VORONTSOV, Alexander; EMELYANOV, Andrey; FORSH, Pavel; KONSTANTINOVA, Elizaveta; KASHKAROV, Pavel
(Tehnica UTM, 2014)
The structural and electronic properties of thin protocrystalline silicon films obtained by
plasma-enhanced chemical vapor deposition from hydrogen (H2) and monosilane (SiH4) gas mixture have been studied by means of ...