RAEVSCHI, Simion; BOTNARIUC, Vasile; GORCEAC, Leonid; TIRON, Stefan; KOMPAN, Mihail; ZHILYAEV, Yurii
(Tehnica UTM, 2013)
There were obtained nanodimensional AlN layers on Si by HVPE (Hydride Vapor Phase Epitaxy) method. SEM (Scanning Electron Microscopy) images of AlN layers, and cross-sections of AlN/Si structures are shown. The structure ...