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Study of Ga2O3 thin films obtained by aerosol spray pirolysis
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| dc.contributor.author | MORARI, Vadim | |
| dc.contributor.author | RUSU, Emil | |
| dc.contributor.author | ZALAMAI, Victor | |
| dc.contributor.author | MESHALKIN, Alexei | |
| dc.date.accessioned | 2024-04-25T10:19:18Z | |
| dc.date.available | 2024-04-25T10:19:18Z | |
| dc.date.issued | 2024 | |
| dc.identifier.citation | MORARI, Vadim et al. Study of Ga2O3 thin films obtained by aerosol spray pirolysis. In: Quo Vadis – Ethics of the Scientific Research: conf. NANO-2024, event devoted to the 60th anniversary of the Technical University of Moldova, 15-18 April 2024, Chişinău, Republica Moldova: Program and proceedings of the conference, Chişinău 2024, pp. 71-72. ISBN 978-9975-64-422-8. | en_US |
| dc.identifier.isbn | 978-9975-64-422-8 | |
| dc.identifier.uri | http://repository.utm.md/handle/5014/26914 | |
| dc.description.abstract | Gallium oxide thin films have been grown by various techniques such as chemical vapor deposition (CVD), vacuum thermal evaporation, atomic layer deposition (ALD), but less from chemical solutions. In this research, we have developed the spray pyrolysis technology which is a pretty cheap, low-cost and simple technology, ideal for optoelectronic applications and allows us to obtain thin films of different thicknesses controlling the temperature and speed of deposition. | en_US |
| dc.language.iso | en | en_US |
| dc.publisher | Technical University of Moldova | en_US |
| dc.relation.ispartofseries | NANO-2024 "Quo Vadis – Ethics of the Scientific Research", event devoted to the 60th anniversary of the Technical University of Moldova;15-18 April 2024, Chişinău, Republica Moldova | |
| dc.rights | Attribution-NonCommercial-NoDerivs 3.0 United States | * |
| dc.rights.uri | http://creativecommons.org/licenses/by-nc-nd/3.0/us/ | * |
| dc.subject | gallium oxide thin films | en_US |
| dc.subject | spray pyrolysis technology | en_US |
| dc.subject | thin films | en_US |
| dc.title | Study of Ga2O3 thin films obtained by aerosol spray pirolysis | en_US |
| dc.type | Article | en_US |
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