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Characterization of Films Prepared by Aerosol Spray Deposition in the (MgO)x(In2O3)(1−x) System

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dc.contributor.author MORARI, Vadim
dc.contributor.author RUSU, Daniela
dc.contributor.author RUSU, Emil V.
dc.contributor.author URSAKI, Veaceslav V.
dc.contributor.author TIGINYANU, Ion M.
dc.date.accessioned 2023-11-02T07:00:14Z
dc.date.available 2023-11-02T07:00:14Z
dc.date.issued 2023
dc.identifier.citation MORARI, Vadim, RUSU, Daniela, RUSU, Emil V. et al. Characterization of Films Prepared by Aerosol Spray Deposition in the (MgO)x(In2O3)(1−x) System. In: 6th International Conference on Nanotechnologies and Biomedical Engineering: proc. of ICNBME-2023, 20–23, 2023, Chisinau, vol. 1: Nanotechnologies and Nano-biomaterials for Applications in Medicine, 2023, p. 52-59. ISBN 978-3-031-42774-9. e-ISBN 978-3-031-42775-6. en_US
dc.identifier.isbn 978-3-031-42774-9
dc.identifier.isbn 978-3-031-42775-6
dc.identifier.uri https://doi.org/10.1007/978-3-031-42775-6_6
dc.identifier.uri http://repository.utm.md/handle/5014/24599
dc.description Acces full text - https://doi.org/10.1007/978-3-031-42775-6_6 en_US
dc.description.abstract In this paper nanostructured thin films with thickness of 150 nm have been prepared by aerosol deposition method on p-Si in the system (MgO)x(In2O3)(1−x) with the composition range x = 0.2, 0.4 and 0.6, using indium chloride and magnesium chloride as precursors. The produced films were investigated by scanning electron microscopy (SEM) and atomic force microscopy (AFM) to determine the morphology and roughness, energy dispersive X-ray (EDX) analysis for the chemical composition estimation, and X-ray diffraction (XRD) for establishing the structural and crystallographic phases. It was found that the nano-crystallites sizes grow with increasing the Mg content, therefore influencing the roughness of the films. The film surface roughness calculated from topographic AFM images is in the RMS range from 5.7 to 7.5 nm with increasing Mg concentration, but the value of the Coefficient of Kurtosis parameter is from 0.18 to 0.64. The evolution of the crystalline phases content with increasing the x value from 0.2 to 0.6 was established. The electrical and photoelectrical properties were studied by I-V characterization under the illumination with the light with the wavelength of 365 nm. It was shown that the films are sensitive to this radiation with the ratio of the photocurrent to the dark current from 5 to 7 at the excitation density of 2.4 mW/cm−2. en_US
dc.language.iso en en_US
dc.publisher Springer Nature Switzerland en_US
dc.rights Attribution-NonCommercial-NoDerivs 3.0 United States *
dc.rights.uri http://creativecommons.org/licenses/by-nc-nd/3.0/us/ *
dc.subject aerosol spray depositions en_US
dc.subject nanostructured thin films en_US
dc.subject scanning electron microscopy en_US
dc.subject atomic force microscopy en_US
dc.subject nano-crystallites en_US
dc.subject crystalline phases en_US
dc.title Characterization of Films Prepared by Aerosol Spray Deposition in the (MgO)x(In2O3)(1−x) System en_US
dc.type Article en_US


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  • 2023
    6th International Conference on Nanotechnologies and Biomedical Engineering, September 20–23, 2023, Chisinau, Moldova

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Attribution-NonCommercial-NoDerivs 3.0 United States Except where otherwise noted, this item's license is described as Attribution-NonCommercial-NoDerivs 3.0 United States

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