Process for independent pore networks obtaining in semiconductor wafers

MONAICO, Eduard; URSAKI, Veaceslav; TIGINYANU, Ion

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dc.contributor.author	MONAICO, Eduard
dc.contributor.author	URSAKI, Veaceslav
dc.contributor.author	TIGINYANU, Ion
dc.date.accessioned	2022-05-20T10:39:41Z
dc.date.available	2022-05-20T10:39:41Z
dc.date.issued	2022
dc.identifier.citation	MONAICO, Eduard, URSAKI, Veaceslav, TIGINYANU, Ion. Process for independent pore networks obtaining in semiconductor wafers. In: European Exhibition of Creativity and Innovation: proc. of the 14th ed. EUROINVENT, Iasi, Romania: hybrid ed., 2022, pp. 150-151. ISSN 2601-4564. e-ISSN 2601-4572.	en_US
dc.identifier.issn	2601-4564
dc.identifier.issn	2601-4572
dc.identifier.uri	http://repository.utm.md/handle/5014/20335
dc.description	Istitution: Technical University of Moldova. Patent application No. a 2022 0001 from 24.01.2022. Exibits Clasification: Class no. 14. - Other.	en_US
dc.description.abstract	The invention relates to the technology for the production of nanostructured materials, in particular to processes for obtaining of semiconductor nanostructures by electrochemical etching, which can be used in microfluidics and micro-electro-mechanical systems (MEMS).	en_US
dc.language	en
dc.publisher	Romanian Inventors Forum	en_US
dc.rights	Attribution-NonCommercial-NoDerivs 3.0 United States	*
dc.rights.uri	http://creativecommons.org/licenses/by-nc-nd/3.0/us/	*
dc.subject	invenţii	en_US
dc.subject	inventions	en_US
dc.subject	nanostructured materials	en_US
dc.subject	semiconductor nanostructures	en_US
dc.subject	electrochemical etching	en_US
dc.subject	Micro-Electro-Mechanical Systems	en_US
dc.subject	microfluidics	en_US
dc.title	Process for independent pore networks obtaining in semiconductor wafers	en_US
dc.type	Article	en_US