CIOBANU, Vladimir; BRANISTE, Tudor; POPA, Veaceslav; GRIDENCO, Oleg; BATIRI, Mihail; TIGINYANU, Ion
(Technical University of Moldova, 2015)
We propose for the implementation a cost effective technological route allowing one to fabricate ultrathin GaN membranes for sensor applications. The main efforts are focused on the design and development of active parts ...