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Extinderea suprafeţei membranelor ultra-subţiri în baza GaN în procesul de fabricare prin utilizarea litografiei cu sarcină de suprafaţă

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dc.contributor.author BATÎRI, M.
dc.contributor.author CIOBANU, V.
dc.contributor.author BRANIŞTE, F.
dc.contributor.author MONAICO, E.
dc.contributor.author TIGINYANU, I.
dc.date.accessioned 2019-07-16T11:38:24Z
dc.date.available 2019-07-16T11:38:24Z
dc.date.issued 2015
dc.identifier.citation BATÎRI, M., CIOBANU, V., BRANIŞTE, F. et al. Extinderea suprafeţei membranelor ultra-subţiri în baza GaN în procesul de fabricare prin utilizarea litografiei cu sarcină de suprafaţă. In: Telecomunicaţii, Electronică şi Informatică: proc. of the 5th intern. conf., May 20-23, 2015. Chişinău, 2015, pp. 239-241. ISBN 978-9975-45-377-6. en_US
dc.identifier.isbn 978-9975-45-377-6
dc.identifier.uri http://repository.utm.md/handle/5014/3555
dc.description.abstract We propose for the implementation a cost effective technological route in the obtaining process of ultrathin GaN membranes. Our technique is based on the modified version of previously described Surface Charge Lithography method. In achieving this goal, several steps were involved such as ion treatment of the surface in a controlled manner and photoelectrochemical etching process. As a result, choosing the right parameters of the Ar+ plasma treatment, mask design, and etching conditions it is possible to obtain ultrathin continuous GaN membranes with large surface area. en_US
dc.language.iso ro en_US
dc.publisher Technical University of Moldova en_US
dc.rights Attribution-NonCommercial-NoDerivs 3.0 United States *
dc.rights.uri http://creativecommons.org/licenses/by-nc-nd/3.0/us/ *
dc.subject Surface Charge Lithography en_US
dc.subject gallium nitride en_US
dc.subject ultrasonic membranes en_US
dc.subject photoelectrochemical pickling en_US
dc.subject nitrură de galiu en_US
dc.subject membrane ultrasubţiri en_US
dc.subject decapare fotoelectrochimică en_US
dc.title Extinderea suprafeţei membranelor ultra-subţiri în baza GaN în procesul de fabricare prin utilizarea litografiei cu sarcină de suprafaţă en_US
dc.type Article en_US


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