CONRAD, Holger; SCHENK, Harald; KAISER, Bert; LANGA, Sergiu; GAUDET, Matthieu; SCHIMMANZ, Klaus; STOLZ, Michael; LENZ, Miriam
(Springer Nature Limited, 2015)
Common quasi-static electrostatic micro actuators have significant limitations in deflection due to electrode separation and unstable drive regions. State-of-the-art electrostatic actuators achieve maximum deflections of ...