Browsing by Subject "nanoelectromechanical systems"

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  • Electrostatic bending actuators with a liquid filled nanometer scale gap 
    GAUDET, M.; UHLIG, S.; STOLZ, M.; ARSCOTT, S.; CONRAD, H.; LANGA, S.; KAISER, B.; SCHENK, H. (IEEE, 2017)
    We report a considerable improvement in the electrostatic actuation of silicon-based nano electrostatic drive (NED) structures [1] via the insertion of a liquid into the nanosystem. The dielectric liquid provides an ...
  • Some reliability aspects of MEMS and NEMS manufacturing 
    BĂJENESCU, Titu-Marius I. (Technical University of Moldova, 2021)
    A full understanding of the physics and statistics of the defect generation is required to investigate the ultimate reliability limitations of manufacturability of MEMS and NEMS. In order that the user can include electronic ...

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