ZDRAVKOV, Vladimir Ilich; MORARI, Roman Andreevich; SIDORENKO, Anatoli Sergeevich
(Springer Nature Switzerland, 2008)
High quality Nb nanoscale films of large area (7 × 80 mm2) and constant thickness were deposited by DC-magnetron sputtering in commercial “Leybold Z400” vacuum system. Homogeneity and proper thickness of the Nb layer ...