SPITZ, B.; WALL, F.; SCHENK, H.; MELNIKOV, A.; EHRIG, L.; LANGA, S.; STOLZ, M.; KAISER, B.; CONRAD, H.; SCHENK, H.
(IEEE, 2019)
Recently an innovative mSpeaker technology, based on a novel kind of CMOS compatible small gap electrostatic actuators for large deflection, has been introduced. In this paper, we devise methods to model such speakers in ...