Browsing by Author "UHLIG, Sebastian"

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  • A contribution to the expansion of the applicability of electrostatic forces in micro transducers 
    SCHENK, Harald; CONRAD, Holger; GAUDET, Matthieu; UHLIG, Sebastian; KAISER, Bert; LANGA, Sergiu; STOLZ, Michael; SCHIMMANZ, Klaus (Society of Photo-Optical Instrumentation Engineers, SPIE, 2017)
    Electrostatic actuation is highly efficient at micro and nanoscale. However, large deflection in common electrostatically driven MEMS requires large electrode separation and thus high driving voltages. To offer a solution ...
  • Electrostatically Driven In-Plane Silicon Micropump for Modular Configuration 
    UHLIG, Sebastian; GAUDET, Matthieu; LANGA, Sergiu; SCHIMMANZ, Klaus; CONRAD, Holger; KAISER, Bert; SCHENK, Harald (MDPI (Basel, Switzerland), 2018)
    In this paper, an in-plane reciprocating displacement micropump for liquids and gases which is actuated by a new class of electrostatic bending actuators is reported. The so-called “Nano Electrostatic Drive” is capable of ...

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