SCHENK, Harald; CONRAD, Holger; GAUDET, Matthieu; UHLIG, Sebastian; KAISER, Bert; LANGA, Sergiu; STOLZ, Michael; SCHIMMANZ, Klaus
(Society of Photo-Optical Instrumentation Engineers, SPIE, 2017)
Electrostatic actuation is highly efficient at micro and nanoscale. However, large deflection in common electrostatically driven MEMS requires large electrode separation and thus high driving voltages. To offer a solution ...