Abstract:
Porous InP templates with parallel pores possessing diameters of 80 nm have been fabricated by anodic etching of commercially available n-InP substrates with (100) orientation in neutral electrolyte (NaCl). Comparative studies of pulsed electrochemical deposition of Pt and Bi2Te3 and evolution of nanodots growth have been investigated. The dependence of Pt and Bi2Te3 deposition uniformity upon the cathodic potential, duration of voltage pulse and delay time between pulses was studied systematically. As a result technological conditions for uniform deposition of Pt on inner surface of pores in porous InP were identified.