GUARACAO, J. M. M.; KIRCHER, M.; WALL, F.; KRENKEL, M.; KAISER, B.; LANGA, S.; SCHENK, H.
(IEEE, 2020)
The design, fabrication, and acoustic characterization of an electrostatic ultrasound transducer based on lateral actuation is documented in this letter. Unlike cMUTs or pMUTs, this device-NED-MUT -does not use a membrane ...